Inventor
KOSUDA MOTOMU
JP6 patents
⚠️ This page may combine multiple inventors who share the name “KOSUDA MOTOMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON ANELVA CORP
4 patentsUS7857946B2Dec 28, 2010
Sputtering film forming method, electronic device manufacturing method, and sputtering system
CANON ANELVA CORP7 citations71
US7655549B2Feb 2, 2010
Method for depositing a metal gate on a high-k dielectric film
CANON ANELVA CORP4 citations57
US8026143B2Sep 27, 2011
Semiconductor element and manufacturing method thereof
CANON ANELVA CORP1 citations51
US10378100B2Aug 13, 2019
Sputtering apparatus and recording medium for recording control program thereof
CANON ANELVA CORP0 citations41