Inventor
SLOT ERWIN
NL15 patents
⚠️ This page may combine multiple inventors who share the name “SLOT ERWIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUSRE48046EJun 9, 2020
Lithography system, sensor and measuring method
ASML NETHERLANDS BV2 citations72
USRE48903EJan 25, 2022
Apparatus for transferring a substrate in a lithography system
ASML NETHERLANDS BV0 citations62
USRE49952EApr 30, 2024
Beam grid layout
ASML NETHERLANDS BV0 citations61
USRE49602EAug 8, 2023
Lithography system, sensor and measuring method
ASML NETHERLANDS BV0 citations61
USRE49732ENov 21, 2023
Charged particle lithography system with alignment sensor and beam measurement sensor
ASML NETHERLANDS BV0 citations59
US12394589B2Aug 19, 2025
Charged particle device, detector, and methods
ASML NETHERLANDS BV0 citations50
MAPPER LITHOGRAPHY IP BV
5 patentsUS7868300B2Jan 11, 2011
Lithography system, sensor and measuring method
MAPPER LITHOGRAPHY IP BV30 citations91
US9575418B2Feb 21, 2017
Apparatus for transferring a substrate in a lithography system
MAPPER LITHOGRAPHY IP BV4 citations83
US9934943B2Apr 3, 2018
Beam grid layout
MAPPER LITHOGRAPHY IP BV3 citations72
US9665014B2May 30, 2017
Charged particle lithography system with alignment sensor and beam measurement sensor
MAPPER LITHOGRAPHY IP BV2 citations70
USRE45206EOct 28, 2014
Lithography system, sensor and measuring method
MAPPER LITHOGRAPHY IP BV1 citations58