Inventor

TEEPEN TIJS FRANS

NL5 patents

⚠️ This page may combine multiple inventors who share the name “TEEPEN TIJS FRANS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MAPPER LITHOGRAPHY IP BV

2 patents

US7868300B2Jan 11, 2011

Lithography system, sensor and measuring method

MAPPER LITHOGRAPHY IP BV30 citations91

USRE45206EOct 28, 2014

Lithography system, sensor and measuring method

MAPPER LITHOGRAPHY IP BV1 citations58

ASML NETHERLANDS BV

2 patents

USRE48046EJun 9, 2020

Lithography system, sensor and measuring method

ASML NETHERLANDS BV2 citations72

USRE49602EAug 8, 2023

Lithography system, sensor and measuring method

ASML NETHERLANDS BV0 citations61

BALTUSSEN SANDER

1 patent

US8690005B2Apr 8, 2014

Charged particle lithography apparatus and method of generating vacuum in a vacuum chamber

BALTUSSEN SANDER2 citations50