Inventor

WALDE MICHAEL

DE2 patents

⚠️ This page may combine multiple inventors who share the name “WALDE MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEYBOLD HERAEUS GMBH & CO KG

1 patent

US4820106AApr 11, 1989

Apparatus for passing workpieces into and out of a coating chamber through locks

LEYBOLD HERAEUS GMBH & CO KG50 citations89

LEYBOLD AG

1 patent

US4907526AMar 13, 1990

Installation for charging and discharging substrates out of a vacuum tank

LEYBOLD AG11 citations61