Inventor
WAETERLOOS JOOST J M
BE2 patents
Patents
2 patentsUS7115531B2Oct 3, 2006
Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
DOW GLOBAL TECHNOLOGIES INC35 citations90
US6815333B2Nov 9, 2004
Tri-layer masking architecture for patterning dual damascene interconnects
DOW GLOBAL TECHNOLOGIES INC34 citations89