Inventor
UKAJI TAKAO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “UKAJI TAKAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
11 patentsUS4929893AMay 29, 1990
Wafer prober
CANON KK206 citations98
US6285457B2Sep 4, 2001
Exposure apparatus and device manufacturing method including measuring position and/or displacement of each of a base and a stage with respect to a support
CANON KK55 citations95
US6847132B2Jan 25, 2005
Electromagnetic actuator having an armature coil surrounded by heat-conducting anisotropy material and exposure apparatus
CANON KK28 citations92
US6654098B2Nov 25, 2003
Stage apparatus, exposure apparatus, and device production method
CANON KK30 citations92
US5773953AJun 30, 1998
Substrate transfer system
CANON KK20 citations92
US4934064AJun 19, 1990
Alignment method in a wafer prober
CANON KK46 citations92
US7686144B2Mar 30, 2010
Vibration isolation device, arithmetic apparatus, exposure apparatus, and device manufacturing method
CANON KK9 citations83
US7294906B2Nov 13, 2007
Wiring technique
CANON KK11 citations83
US4779981AOct 25, 1988
Reject chip marking device and method of discriminating reject mark
CANON KK7 citations73
US7081950B2Jul 25, 2006
Stage device and control method therefor, exposure apparatus, and device manufacturing method
CANON KK2 citations62
US7955938B2Jun 7, 2011
Wiring technique
CANON KK0 citations51