Inventor
KAWASHIMA HARUNA
JP26 patents
⚠️ This page may combine multiple inventors who share the name “KAWASHIMA HARUNA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
22 patentsUS5602400AFeb 11, 1997
Surface position detecting method and apparatus including detection and correction of errors, such as surface position errors or tilt, in exposure regions
CANON KK62 citations96
US5218415AJun 8, 1993
Device for optically detecting inclination of a surface
CANON KK69 citations96
US5118957AJun 2, 1992
Method and apparatus for precisely detecting surface position of a patterned wafer
CANON KK77 citations96
US5117254AMay 26, 1992
Projection exposure apparatus
CANON KK61 citations96
US5162642ANov 10, 1992
Device for detecting the position of a surface
CANON KK75 citations95
US6023320AFeb 8, 2000
Scanning exposure apparatus with surface position detecting system
CANON KK31 citations92
US5955739ASep 21, 1999
Surface position detection device
CANON KK29 citations92
US5751428AMay 12, 1998
Exposure method and exposure apparatus using the same
CANON KK33 citations92
US5489966AFeb 6, 1996
Projection exposure apparatus
CANON KK33 citations92
US5414515AMay 9, 1995
Surface position detecting device
CANON KK34 citations92
US5323016AJun 21, 1994
Focusing method
CANON KK50 citations92
US5124562AJun 23, 1992
Surface position detecting method at a predetermined and plurality of adjacent points
CANON KK26 citations92
US4952970AAug 28, 1990
Autofocusing system for a projecting exposure apparatus
CANON KK41 citations92
US7145635B2Dec 5, 2006
Exposure method and apparatus
CANON KK8 citations74
US6727982B2Apr 27, 2004
Illumination system with plural light sources, and exposure apparatus having the same
CANON KK8 citations70
US7630058B2Dec 8, 2009
Exposure apparatus and device manufacturing method
CANON KK6 citations63
US7057820B2Jun 6, 2006
Projection optical system
CANON KK2 citations63
US7619716B2Nov 17, 2009
Exposure method
CANON KK2 citations57
US7525656B2Apr 28, 2009
Exposure apparatus and device fabrication method
CANON KK2 citations57
US10216092B2Feb 26, 2019
Light source apparatus, illumination device, exposure apparatus, and device manufacturing method
CANON KK0 citations52
US9772560B2Sep 26, 2017
Light source apparatus, illumination device, exposure apparatus, and device manufacturing method
CANON KK0 citations52
US7880862B2Feb 1, 2011
Exposure apparatus and device fabrication method
CANON KK0 citations52