Inventor

DIAO LI

US4 patents

⚠️ This page may combine multiple inventors who share the name “DIAO LI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON TECH INC

2 patents

US9396963B2Jul 19, 2016

Mask removal process strategy for vertical NAND device

MATTSON TECH INC7 citations77

US10431469B2Oct 1, 2019

Method for high aspect ratio photoresist removal in pure reducing plasma

MATTSON TECH INC5 citations66

BEIJING E TOWN SEMICONDUCTOR TECH CO LTD

1 patent

US11107693B2Aug 31, 2021

Method for high aspect ratio photoresist removal in pure reducing plasma

BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations55

DIAO LI

1 patent

US8093157B2Jan 10, 2012

Advanced processing technique and system for preserving tungsten in a device structure

DIAO LI3 citations53