Inventor

FANG SUNG-JEN

US2 patents

Patents

2 patents

US6326293B1Dec 4, 2001

Formation of recessed polysilicon plugs using chemical-mechanical-polishing (CMP) and selective oxidation

TEXAS INSTRUMENTS INC24 citations89

US6561868B1May 13, 2003

System and method for controlling a polishing machine

TEXAS INSTRUMENTS INC8 citations71