Inventor

MICHAEL LISA H

US2 patents

⚠️ This page may combine multiple inventors who share the name “MICHAEL LISA H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SILICON VALLEY GROUP THERMAL

1 patent

US6206973B1Mar 27, 2001

Chemical vapor deposition system and method

SILICON VALLEY GROUP THERMAL29 citations89

ASML US INC

1 patent

US6485783B1Nov 26, 2002

Chemical vapor deposition system

ASML US INC5 citations71