Inventor
KOLE MAGHIEL JAN
US2 patents
Patents
2 patentsUS9581392B2Feb 28, 2017
Arrangement for cooling a plasma-based radiation source with a metal cooling liquid and method for starting up a cooling arrangement of this type
USHIO ELECTRIC INC0 citations33
US9202659B2Dec 1, 2015
Arrangement and method for cooling a plasma-based radiation source
USHIO ELECTRIC INC0 citations29