Inventor

SEKIGUCHI ATSUKO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SEKIGUCHI ATSUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUI CHEMICALS INC

2 patents

US11042085B2Jun 22, 2021

Pellicle film, pellicle frame, pellicle, method for producing same, original plate for light exposure, light exposure apparatus and method for manufacturing semiconductor device

MITSUI CHEMICALS INC4 citations71

US12287569B2Apr 29, 2025

Pellicle film for photolithography, pellicle, photolithography mask, photolithography system, and method of producing pellicle film for photolithography

MITSUI CHEMICALS INC0 citations59

AIST

1 patent

US10023715B2Jul 17, 2018

Elastomer structure containing carbon nanotubes and method for producing the same

AIST1 citations48