Inventor

BRAVENEC RONALD V

US2 patents

⚠️ This page may combine multiple inventors who share the name “BRAVENEC RONALD V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN LEE

1 patent

US8415884B2Apr 9, 2013

Stable surface wave plasma source

CHEN LEE240 citations97

TOKYO ELECTRON LTD

1 patent

US8669705B2Mar 11, 2014

Stable surface wave plasma source

TOKYO ELECTRON LTD3 citations61