Inventor
HARNISCH GERD
DE6 patents
⚠️ This page may combine multiple inventors who share the name “HARNISCH GERD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCHUBERT GERHARD
3 patentsUS8529130B2Sep 10, 2013
Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application
SCHUBERT GERHARD2 citations58
US8267582B2Sep 18, 2012
Table guided by aerostatic bearing elements for vacuum application
SCHUBERT GERHARD3 citations58
US8496221B2Jul 30, 2013
Aerostatically guided table system for vacuum application
SCHUBERT GERHARD1 citations48