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Inventor
SEDIGH MEHRAN G
US
2 patents
Patents
2 patents
US6803318B1
Oct 12, 2004
Method of forming self aligned contacts
CYPRESS SEMICONDUCTOR CORP
94 citations
95
US6693042B1
Feb 17, 2004
Method for etching a dielectric layer formed upon a barrier layer
CYPRESS SEMICONDUCTOR CORP
17 citations
82