Inventor
FARNSWORTH WINDY LYNN
US2 patents
Patents
2 patentsUS8625070B2Jan 7, 2014
Lithographic apparatus, projection system and damper for use in a lithographic apparatus and device manufacturing method
FARNSWORTH WINDY LYNN3 citations56
US8947634B2Feb 3, 2015
Apparatus for supporting an optical element, and method of making same
FARNSWORTH WINDY LYNN3 citations46