Inventor
ROGALSKY OLAF
DE8 patents
⚠️ This page may combine multiple inventors who share the name “ROGALSKY OLAF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
5 patentsUS9494868B2Nov 15, 2016
Lithographic projection objective
ZEISS CARL SMT GMBH2 citations60
US11256182B2Feb 22, 2022
Process for cleaning optical elements for the ultraviolet wavelength range
ZEISS CARL SMT GMBH0 citations58
US9164396B2Oct 20, 2015
Projection lens system of a microlithographic projection exposure installation
ZEISS CARL SMT GMBH0 citations51
US10042265B2Aug 7, 2018
Lithographic projection objective
ZEISS CARL SMT GMBH0 citations49
US10754132B2Aug 25, 2020
Imaging optical system for microlithography
ZEISS CARL SMT GMBH0 citations41