Inventor

LACHAUD CHRISTOPHE

FR6 patents

⚠️ This page may combine multiple inventors who share the name “LACHAUD CHRISTOPHE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DUSSARRAT CHRISTIAN

2 patents

US8668957B2Mar 11, 2014

Method of forming dielectric films, new precursors and their use in semiconductor manufacturing

DUSSARRAT CHRISTIAN535 citations98

US8470402B2Jun 25, 2013

Method of depositing a metal-containing dielectric film

DUSSARRAT CHRISTIAN10 citations83

AIR LIQUIDE

2 patents

US9911590B2Mar 6, 2018

Methods of forming dielectric films, new precursors and their use in semiconductor manufacturing

AIR LIQUIDE14 citations92

US10217629B2Feb 26, 2019

Method of forming dielectric films, new precursors and their use in semiconductor manufacturing

AIR LIQUIDE1 citations72

GATINEAU SATOKO

1 patent

US8853075B2Oct 7, 2014

Method for forming a titanium-containing layer on a substrate using an atomic layer deposition (ALD) process

GATINEAU SATOKO14 citations81

L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude

1 patent

US9583335B2Feb 28, 2017

Method of forming dielectric films, new precursors and their use in semiconductor manufacturing

L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude1 citations62