Inventor
TAKEDA TAKANOBU
JP50 patents
⚠️ This page may combine multiple inventors who share the name “TAKEDA TAKANOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
35 patentsUS6312867B1Nov 6, 2001
Ester compounds, polymers, resist compositions and patterning process
SHINETSU CHEMICAL CO209 citations99
US6994946B2Feb 7, 2006
Silicon-containing polymer, resist composition and patterning process
SHINETSU CHEMICAL CO32 citations93
US6919161B2Jul 19, 2005
Silicon-containing polymer, resist composition and patterning process
SHINETSU CHEMICAL CO32 citations93
US6902772B2Jun 7, 2005
Silicon-containing polymer, resist composition and patterning process
SHINETSU CHEMICAL CO23 citations93
US6746817B2Jun 8, 2004
Resist composition and patterning process
SHINETSU CHEMICAL CO49 citations93
US6455223B1Sep 24, 2002
Resist compositions and patterning process
SHINETSU CHEMICAL CO28 citations93
US6414101B1Jul 2, 2002
Dendritic polymers and making method
SHINETSU CHEMICAL CO20 citations93
US7501223B2Mar 10, 2009
Polymer, resist composition and patterning process using the same
SHINETSU CHEMICAL CO20 citations92
US6593056B2Jul 15, 2003
Chemically amplified positive resist composition and patterning method
SHINETSU CHEMICAL CO26 citations92
US8343694B2Jan 1, 2013
Photomask blank, resist pattern forming process, and photomask preparation process
SHINETSU CHEMICAL CO11 citations84
US7977027B2Jul 12, 2011
Resist composition and patterning process
SHINETSU CHEMICAL CO15 citations84
US7887991B2Feb 15, 2011
Positive resist composition and patterning process using the same
SHINETSU CHEMICAL CO7 citations84
US7745104B2Jun 29, 2010
Bottom resist layer composition and patterning process using the same
SHINETSU CHEMICAL CO15 citations84
US7416833B2Aug 26, 2008
Photoresist undercoat-forming material and patterning process
SHINETSU CHEMICAL CO17 citations84
US7232638B2Jun 19, 2007
Resist composition and patterning process
SHINETSU CHEMICAL CO11 citations84
US6949323B2Sep 27, 2005
Resist composition and patterning process
SHINETSU CHEMICAL CO13 citations84
US6869748B2Mar 22, 2005
Resist composition and patterning process
SHINETSU CHEMICAL CO12 citations84
US6156481ADec 5, 2000
Positive resist composition
SHINETSU CHEMICAL CO17 citations84
US6835804B2Dec 28, 2004
Preparation of polymer, and resist composition using the polymer
SHINETSU CHEMICAL CO8 citations74
US6653044B2Nov 25, 2003
Chemical amplification type resist composition
SHINETSU CHEMICAL CO10 citations74
US6641975B2Nov 4, 2003
Resist composition and patterning process
SHINETSU CHEMICAL CO12 citations74
US6861198B2Mar 1, 2005
Negative resist material and pattern formation method using the same
SHINETSU CHEMICAL CO9 citations73
US6737214B2May 18, 2004
Chemical amplification resist compositions
SHINETSU CHEMICAL CO7 citations73
US7267923B2Sep 11, 2007
Resist composition and patterning process
SHINETSU CHEMICAL CO8 citations71
US7923195B2Apr 12, 2011
Positive resist composition and patterning process using the same
SHINETSU CHEMICAL CO2 citations63
US7655378B2Feb 2, 2010
Negative resist composition and patterning process using the same
SHINETSU CHEMICAL CO2 citations63
US7491483B2Feb 17, 2009
Polymers, positive resist compositions and patterning process
SHINETSU CHEMICAL CO6 citations63
US7476486B2Jan 13, 2009
Resist composition and patterning process
SHINETSU CHEMICAL CO2 citations63
US7135269B2Nov 14, 2006
Polymer, resist composition and patterning process
SHINETSU CHEMICAL CO2 citations63
US5730901AMar 24, 1998
Silacyclohexane compounds, preparation thereof liquid crystal compositions comprising the same, and liquid crystal devices comprising the composition
SHINETSU CHEMICAL CO3 citations63
US8378148B2Feb 19, 2013
Alcoholic hydroxyl-containing compounds and making method
SHINETSU CHEMICAL CO2 citations62
US6994945B2Feb 7, 2006
Silicon-containing polymer, resist composition and patterning process
SHINETSU CHEMICAL CO5 citations62
US7618763B2Nov 17, 2009
Resist composition and patterning process
SHINETSU CHEMICAL CO4 citations60
US8367295B2Feb 5, 2013
Preparation process of chemically amplified resist composition
SHINETSU CHEMICAL CO0 citations52
US5725797AMar 10, 1998
Silacyclohexane compound, a process for producing the same, and a liquid crystal composition comprising the same
SHINETSU CHEMICAL CO1 citations52
TAKEDA TAKANOBU
6 patentsUS9075306B2Jul 7, 2015
Chemically amplified negative resist composition and patterning process
TAKEDA TAKANOBU22 citations92
US8202677B2Jun 19, 2012
Chemically-amplified positive resist composition and patterning process thereof
TAKEDA TAKANOBU7 citations84
US8889810B2Nov 18, 2014
Adhesive composition and adhesive dry film
TAKEDA TAKANOBU8 citations83
US8481244B2Jul 9, 2013
Epoxy-containing polymer, photo-curable resin composition, patterning process, and electric/electronic part protective film
TAKEDA TAKANOBU5 citations73
US8110335B2Feb 7, 2012
Resist patterning process and manufacturing photo mask
TAKEDA TAKANOBU6 citations72
US8193307B2Jun 5, 2012
Synthesis of photoresist polymer
TAKEDA TAKANOBU0 citations41