P

Inventor

TAKEDA TAKANOBU

JP50 patents
⚠️ This page may combine multiple inventors who share the name “TAKEDA TAKANOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINETSU CHEMICAL CO

35 patents
US6312867B1Nov 6, 2001

Ester compounds, polymers, resist compositions and patterning process

SHINETSU CHEMICAL CO209 citations99
US6994946B2Feb 7, 2006

Silicon-containing polymer, resist composition and patterning process

SHINETSU CHEMICAL CO32 citations93
US6919161B2Jul 19, 2005

Silicon-containing polymer, resist composition and patterning process

SHINETSU CHEMICAL CO32 citations93
US6902772B2Jun 7, 2005

Silicon-containing polymer, resist composition and patterning process

SHINETSU CHEMICAL CO23 citations93
US6746817B2Jun 8, 2004

Resist composition and patterning process

SHINETSU CHEMICAL CO49 citations93
US6455223B1Sep 24, 2002

Resist compositions and patterning process

SHINETSU CHEMICAL CO28 citations93
US6414101B1Jul 2, 2002

Dendritic polymers and making method

SHINETSU CHEMICAL CO20 citations93
US7501223B2Mar 10, 2009

Polymer, resist composition and patterning process using the same

SHINETSU CHEMICAL CO20 citations92
US6593056B2Jul 15, 2003

Chemically amplified positive resist composition and patterning method

SHINETSU CHEMICAL CO26 citations92
US8343694B2Jan 1, 2013

Photomask blank, resist pattern forming process, and photomask preparation process

SHINETSU CHEMICAL CO11 citations84
US7977027B2Jul 12, 2011

Resist composition and patterning process

SHINETSU CHEMICAL CO15 citations84
US7887991B2Feb 15, 2011

Positive resist composition and patterning process using the same

SHINETSU CHEMICAL CO7 citations84
US7745104B2Jun 29, 2010

Bottom resist layer composition and patterning process using the same

SHINETSU CHEMICAL CO15 citations84
US7416833B2Aug 26, 2008

Photoresist undercoat-forming material and patterning process

SHINETSU CHEMICAL CO17 citations84
US7232638B2Jun 19, 2007

Resist composition and patterning process

SHINETSU CHEMICAL CO11 citations84
US6949323B2Sep 27, 2005

Resist composition and patterning process

SHINETSU CHEMICAL CO13 citations84
US6869748B2Mar 22, 2005

Resist composition and patterning process

SHINETSU CHEMICAL CO12 citations84
US6156481ADec 5, 2000

Positive resist composition

SHINETSU CHEMICAL CO17 citations84
US6835804B2Dec 28, 2004

Preparation of polymer, and resist composition using the polymer

SHINETSU CHEMICAL CO8 citations74
US6653044B2Nov 25, 2003

Chemical amplification type resist composition

SHINETSU CHEMICAL CO10 citations74
US6641975B2Nov 4, 2003

Resist composition and patterning process

SHINETSU CHEMICAL CO12 citations74
US6861198B2Mar 1, 2005

Negative resist material and pattern formation method using the same

SHINETSU CHEMICAL CO9 citations73
US6737214B2May 18, 2004

Chemical amplification resist compositions

SHINETSU CHEMICAL CO7 citations73
US7267923B2Sep 11, 2007

Resist composition and patterning process

SHINETSU CHEMICAL CO8 citations71
US7923195B2Apr 12, 2011

Positive resist composition and patterning process using the same

SHINETSU CHEMICAL CO2 citations63
US7655378B2Feb 2, 2010

Negative resist composition and patterning process using the same

SHINETSU CHEMICAL CO2 citations63
US7491483B2Feb 17, 2009

Polymers, positive resist compositions and patterning process

SHINETSU CHEMICAL CO6 citations63
US7476486B2Jan 13, 2009

Resist composition and patterning process

SHINETSU CHEMICAL CO2 citations63
US7135269B2Nov 14, 2006

Polymer, resist composition and patterning process

SHINETSU CHEMICAL CO2 citations63
US5730901AMar 24, 1998

Silacyclohexane compounds, preparation thereof liquid crystal compositions comprising the same, and liquid crystal devices comprising the composition

SHINETSU CHEMICAL CO3 citations63
US8378148B2Feb 19, 2013

Alcoholic hydroxyl-containing compounds and making method

SHINETSU CHEMICAL CO2 citations62
US6994945B2Feb 7, 2006

Silicon-containing polymer, resist composition and patterning process

SHINETSU CHEMICAL CO5 citations62
US7618763B2Nov 17, 2009

Resist composition and patterning process

SHINETSU CHEMICAL CO4 citations60
US8367295B2Feb 5, 2013

Preparation process of chemically amplified resist composition

SHINETSU CHEMICAL CO0 citations52
US5725797AMar 10, 1998

Silacyclohexane compound, a process for producing the same, and a liquid crystal composition comprising the same

SHINETSU CHEMICAL CO1 citations52

TAKEDA TAKANOBU

6 patents

SHIN ETSU CHEMICAL C LTD

1 patent

FUJIFILM CORP

1 patent

ASAI SATOSHI

1 patent

SHIN ETU CHEMICAL CO LTD

1 patent

TAGAMI SHOHEI

1 patent

SOGA KYOKO

1 patent

TANAKA AKINOBU

1 patent

SHI ETSU CHEMICAL CO LTD

1 patent

YASUDA HIROYUKI

1 patent