Inventor
RITCHIE ALAN
US17 patents
⚠️ This page may combine multiple inventors who share the name “RITCHIE ALAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS9812303B2Nov 7, 2017
Configurable variable position closed track magnetron
APPLIED MATERIALS INC32 citations93
US10692706B2Jun 23, 2020
Methods and apparatus for reducing sputtering of a grounded shield in a process chamber
APPLIED MATERIALS INC3 citations73
US10099245B2Oct 16, 2018
Process kit for deposition and etching
APPLIED MATERIALS INC2 citations73
US11915917B2Feb 27, 2024
Methods and apparatus for reducing sputtering of a grounded shield in a process chamber
APPLIED MATERIALS INC1 citations62
US9028659B2May 12, 2015
Magnetron design for extended target life in radio frequency (RF) plasmas
APPLIED MATERIALS INC1 citations52
US9611539B2Apr 4, 2017
Crystalline orientation and overhang control in collision based RF plasmas
APPLIED MATERIALS INC0 citations41
RITCHIE ALAN
6 patentsUS9580796B2Feb 28, 2017
Deposition apparatus and methods to reduce deposition asymmetry
RITCHIE ALAN31 citations93
US9340866B2May 17, 2016
Substrate support with radio frequency (RF) return path
RITCHIE ALAN3 citations71
US8846451B2Sep 30, 2014
Methods for depositing metal in high aspect ratio features
RITCHIE ALAN2 citations61
US8795487B2Aug 5, 2014
Physical vapor deposition chamber with rotating magnet assembly and centrally fed RF power
RITCHIE ALAN3 citations61
US8702918B2Apr 22, 2014
Apparatus for enabling concentricity of plasma dark space
RITCHIE ALAN1 citations50
US9695502B2Jul 4, 2017
Process kit with plasma-limiting gap
RITCHIE ALAN0 citations40