Inventor
WANG SHAN CHANG
TW6 patents
Patents
6 patentsUS6726554B1Apr 27, 2004
Guide ring removal device
NANYA TECHNOLOGY CORP27 citations90
US6923709B2Aug 2, 2005
Chemical mechanical polishing apparatus having a measuring device for measuring a guide ring
NANYA TECHNOLOGY CORP12 citations82
US6790010B2Sep 14, 2004
Switching system for a reciprocating piston pump
NANYA TECHNOLOGY CORP10 citations71
US6761624B2Jul 13, 2004
Chemical mechanical polishing apparatus
NANYA TECHNOLOGY CORP0 citations50
US6920796B2Jul 26, 2005
Device used for detecting clamping force of processed object and method thereof
NANYA TECHNOLOGY CORP1 citations48
US6772528B2Aug 10, 2004
Incremental offset measurement instrument
NANYA TECHNOLOGY CORP0 citations46