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Inventor
ISOBE KEN
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “ISOBE KEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO MITSUBISHI SILICON
2 patents
US7648409B1
Jan 19, 2010
Double side polishing method and apparatus
SUMITOMO MITSUBISHI SILICON
24 citations
86
US8002610B2
Aug 23, 2011
Double side polishing method and apparatus
SUMITOMO MITSUBISHI SILICON
0 citations
45
FUKUSHIMA HIROTO
1 patent
US8870627B2
Oct 28, 2014
Polishing method and polishing apparatus
FUKUSHIMA HIROTO
2 citations
57