Inventor
LEVIN SAHAR
IL3 patents
Patents
3 patentsUS11651509B2May 16, 2023
Method, system and computer program product for 3D-NAND CDSEM metrology
APPLIED MATERIALS ISRAEL LTD0 citations51
US11686571B2Jun 27, 2023
Local shape deviation in a semiconductor specimen
APPLIED MATERIALS ISRAEL LTD0 citations42
US11455715B2Sep 27, 2022
Epitaxy metrology in fin field effect transistors
APPLIED MATERIALS ISRAEL LTD0 citations42