Inventor
UTLAUT MARK W
US36 patents
⚠️ This page may combine multiple inventors who share the name “UTLAUT MARK W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FEI CO
18 patentsUS6900447B2May 31, 2005
Focused ion beam system with coaxial scanning electron microscope
FEI CO77 citations97
US9934930B2Apr 3, 2018
High aspect ratio x-ray targets and uses of same
FEI CO19 citations93
US6949756B2Sep 27, 2005
Shaped and low density focused ion beams
FEI CO20 citations92
US6683320B2Jan 27, 2004
Through-the-lens neutralization for charged particle beam system
FEI CO32 citations92
US7009187B2Mar 7, 2006
Particle detector suitable for detecting ions and electrons
FEI CO28 citations91
US9040909B2May 26, 2015
System and method for simultaneous detection of secondary electrons and light in a charged particle beam system
FEI CO10 citations84
US6977386B2Dec 20, 2005
Angular aperture shaped beam system and method
FEI CO18 citations84
US10366860B2Jul 30, 2019
High aspect ratio X-ray targets and uses of same
FEI CO5 citations83
US9401262B2Jul 26, 2016
Multi-source plasma focused ion beam system
FEI CO4 citations83
US9029812B2May 12, 2015
Multi-source plasma focused ion beam system
FEI CO4 citations83
US6797969B2Sep 28, 2004
Multi-column FIB for nanofabrication applications
FEI CO12 citations73
US9159534B2Oct 13, 2015
Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source
FEI CO4 citations72
US8692217B2Apr 8, 2014
Multi-source plasma focused ion beam system
FEI CO2 citations61
US9494516B2Nov 15, 2016
System and method for simultaneous detection of secondary electrons and light in a charged particle beam system
FEI CO0 citations52
US9204036B2Dec 1, 2015
Image-enhancing spotlight mode for digital microscopy
FEI CO0 citations50
US9044781B2Jun 2, 2015
Microfluidics delivery systems
FEI CO1 citations49
US8907296B2Dec 9, 2014
Charged particle beam system aperture
FEI CO0 citations49
US9530625B2Dec 27, 2016
Method for attachment of an electrode into an inductively-coupled plasma
FEI CO0 citations48
HUGHES AIRCRAFT CO
5 patentsUS4670685AJun 2, 1987
Liquid metal ion source and alloy for ion emission of multiple ionic species
HUGHES AIRCRAFT CO25 citations89
US4775818AOct 4, 1988
Liquid metal ion source and alloy
HUGHES AIRCRAFT CO6 citations68
US5008602AApr 16, 1991
Signal generator for use in industrial positioning systems
HUGHES AIRCRAFT CO12 citations66
US4967250AOct 30, 1990
Charge-coupled device with focused ion beam fabrication
HUGHES AIRCRAFT CO3 citations62
US5006715AApr 9, 1991
Ion evaporation source for tin
HUGHES AIRCRAFT CO5 citations57
KELLOGG SEAN
4 patentsUS8642974B2Feb 4, 2014
Encapsulation of electrodes in solid media for use in conjunction with fluid high voltage isolation
KELLOGG SEAN7 citations82
US9591735B2Mar 7, 2017
High voltage isolation of an inductively coupled plasma ion source with a liquid that is not actively pumped
KELLOGG SEAN5 citations71
US8987678B2Mar 24, 2015
Encapsulation of electrodes in solid media
KELLOGG SEAN1 citations50
US9053895B2Jun 9, 2015
System for attachment of an electrode into a plasma source
KELLOGG SEAN0 citations49