Inventor
TUGGLE DAVID WILLIAM
US5 patents
Patents
5 patentsUS9401262B2Jul 26, 2016
Multi-source plasma focused ion beam system
FEI CO4 citations83
US9029812B2May 12, 2015
Multi-source plasma focused ion beam system
FEI CO4 citations83
US8803102B2Aug 12, 2014
Retarding field analyzer integral with particle beam column
FEI CO3 citations60
US8907296B2Dec 9, 2014
Charged particle beam system aperture
FEI CO0 citations49
US9679742B2Jun 13, 2017
Method for optimizing charged particle beams formed by shaped apertures
FEI CO1 citations41