Inventor

MANI RADHIKA C

US2 patents

⚠️ This page may combine multiple inventors who share the name “MANI RADHIKA C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

1 patent

US9305797B2Apr 5, 2016

Polysilicon over-etch using hydrogen diluted plasma for three-dimensional gate etch

APPLIED MATERIALS INC8 citations79

SUN NOEL

1 patent

US9533332B2Jan 3, 2017

Methods for in-situ chamber clean utilized in an etching processing chamber

SUN NOEL4 citations63