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Inventor
SNEDIGAR CHRISTOPHER
US
2 patents
Patents
2 patents
US11101136B2
Aug 24, 2021
Process window widening using coated parts in plasma etch processes
APPLIED MATERIALS INC
1 citations
60
US10297458B2
May 21, 2019
Process window widening using coated parts in plasma etch processes
APPLIED MATERIALS INC
1 citations
60