Inventor
CHUN HYUNSOO
KR3 patents
Patents
3 patentsUS11948814B2Apr 2, 2024
Valve structure and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD2 citations64
US12424465B2Sep 23, 2025
Valve structure and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations53
US12360072B2Jul 15, 2025
PH monitoring systems having sensor modules
SAMSUNG ELECTRONICS CO LTD0 citations47