Inventor

POPE KEITH

US2 patents

⚠️ This page may combine multiple inventors who share the name “POPE KEITH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

1 patent

US5935869AAug 10, 1999

Method of planarizing semiconductor wafers

IBM14 citations66

POPE KEITH

1 patent

US7108001B2Sep 19, 2006

Method and apparatus for rotation of a workpiece in supercritical fluid solutions for removing photo resist, residues and particles therefrom

POPE KEITH3 citations47