P

Inventor

NODA TAKAAKI

JP51 patents
⚠️ This page may combine multiple inventors who share the name “NODA TAKAAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

23 patents
US6686281B2Feb 3, 2004

Method for fabricating a semiconductor device and a substrate processing apparatus

HITACHI INT ELECTRIC INC383 citations99
US9865451B2Jan 9, 2018

Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC8 citations84
US9472391B2Oct 18, 2016

Semiconductor device manufacturing method

HITACHI INT ELECTRIC INC11 citations84
US9349586B2May 24, 2016

Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC8 citations84
USD748578SFeb 2, 2016

Adapter plate

HITACHI INT ELECTRIC INC7 citations84
US6872636B2Mar 29, 2005

Method for fabricating a semiconductor device

HITACHI INT ELECTRIC INC13 citations83
US10032626B2Jul 24, 2018

Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC9 citations82
US7556839B2Jul 7, 2009

Method of manufacturing semiconductor device and apparatus for processing substrate

HITACHI INT ELECTRIC INC6 citations74
US9793107B2Oct 17, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC4 citations73
US9698007B2Jul 4, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC3 citations73
US9653326B2May 16, 2017

Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC3 citations73
USD748056SJan 26, 2016

Adapter plate

HITACHI INT ELECTRIC INC3 citations73
US6905963B2Jun 14, 2005

Fabrication of B-doped silicon film by LPCVD method using BCI3 and SiH4 gases

HITACHI INT ELECTRIC INC9 citations67
US9263251B2Feb 16, 2016

Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus

HITACHI INT ELECTRIC INC1 citations62
US12040179B2Jul 16, 2024

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC0 citations60
US9831082B2Nov 28, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC1 citations52
US9673043B2Jun 6, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium

HITACHI INT ELECTRIC INC1 citations52
US9514935B2Dec 6, 2016

Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and program

HITACHI INT ELECTRIC INC0 citations52
US9153430B2Oct 6, 2015

Substrate processing apparatus, method of manufacturing semiconductor device and program

HITACHI INT ELECTRIC INC0 citations52
US7892983B2Feb 22, 2011

Substrate processing apparatus and producing method of semiconductor device

HITACHI INT ELECTRIC INC1 citations52
US9123531B2Sep 1, 2015

Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus

HITACHI INT ELECTRIC INC0 citations51
US10062562B2Aug 28, 2018

Method of manufacturing semiconductor device, substrate processing apparatus and recording medium

HITACHI INT ELECTRIC INC1 citations49
US9530641B2Dec 27, 2016

Method for manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC0 citations42

KOKUSAI ELECTRIC CORP

7 patents

HITACHI LTD

5 patents

DAIDO STEEL CO LTD

3 patents

NODA TAKAAKI

3 patents

DAIKIN IND LTD

2 patents

HITACHI VLSI ENG

1 patent

SUMITOMO HEAVY INDUSTRIES

1 patent

OZAKI TAKASHI

1 patent

YAMAMOTO SATORU

1 patent

MIZUNO NORIKAZU

1 patent

ISUZU MOTORS LTD

1 patent

ISHIBASHI KIYOHISA

1 patent

Showing the top 50 of 51 patents by PatentIndex Score.