Inventor

OZASA RYUTO

JP2 patents

Patents

2 patents

US11059145B2Jul 13, 2021

Dressing apparatus and dressing method for substrate rear surface polishing member

TOKYO ELECTRON LTD2 citations69

US10840079B2Nov 17, 2020

Substrate processing apparatus, substrate processing method and storage medium

TOKYO ELECTRON LTD2 citations68