Inventor
URAKAWA MASAFUMI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “URAKAWA MASAFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS9870898B2Jan 16, 2018
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD48 citations97
US8038835B2Oct 18, 2011
Processing device, electrode, electrode plate, and processing method
TOKYO ELECTRON LTD529 citations95
US10707053B2Jul 7, 2020
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD40 citations94
US9865471B2Jan 9, 2018
Etching method and etching apparatus
TOKYO ELECTRON LTD43 citations92
US11037763B2Jun 15, 2021
Member and plasma processing apparatus
TOKYO ELECTRON LTD3 citations67
US12211678B2Jan 28, 2025
Recipe updating method
TOKYO ELECTRON LTD0 citations61
US7846645B2Dec 7, 2010
Method and system for reducing line edge roughness during pattern etching
TOKYO ELECTRON LTD4 citations61
US7743731B2Jun 29, 2010
Reduced contaminant gas injection system and method of using
TOKYO ELECTRON LTD3 citations59
US9257301B2Feb 9, 2016
Method of etching silicon oxide film
TOKYO ELECTRON LTD0 citations52
US9653316B2May 16, 2017
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD1 citations51
US9530657B2Dec 27, 2016
Method of processing substrate and substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US9224616B2Dec 29, 2015
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations40