Inventor
BREARLEY WILLIAM H
US4 patents
Patents
4 patentsUS6531069B1Mar 11, 2003
Reactive Ion Etching chamber design for flip chip interconnections
IBM144 citations97
US6293457B1Sep 25, 2001
Integrated method for etching of BLM titanium-tungsten alloys for CMOS devices with copper metallization
IBM86 citations95
US7645700B2Jan 12, 2010
Dry etchback of interconnect contacts
IBM5 citations73
US7323410B2Jan 29, 2008
Dry etchback of interconnect contacts
IBM2 citations62