Inventor

DECKER-LUCKE KURT T

US2 patents

Patents

2 patents

US8853653B1Oct 7, 2014

Apparatus and techniques for controlling ion implantation uniformity

VARIAN SEMICONDUCTOR EQUIPMENT6 citations80

US9006692B2Apr 14, 2015

Apparatus and techniques for controlling ion implantation uniformity

VARIAN SEMICONDUCTOR EQUIPMENT1 citations48