Inventor

KIM YANSUNG

US2 patents

⚠️ This page may combine multiple inventors who share the name “KIM YANSUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

1 patent

US9799496B2Oct 24, 2017

Edge exclusion control with adjustable plasma exclusion zone ring

LAM RES CORP0 citations43

KIM KEECHAN

1 patent

US9184030B2Nov 10, 2015

Edge exclusion control with adjustable plasma exclusion zone ring

KIM KEECHAN0 citations41