Inventor
HATTORI AKIYOSHI
JP28 patents
⚠️ This page may combine multiple inventors who share the name “HATTORI AKIYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
13 patentsUS7848075B2Dec 7, 2010
Electrostatic chuck with heater
NGK INSULATORS LTD10 citations84
US7701693B2Apr 20, 2010
Electrostatic chuck with heater and manufacturing method thereof
NGK INSULATORS LTD11 citations84
US7218502B2May 15, 2007
Bonding member and electrostatic chuck
NGK INSULATORS LTD12 citations84
US7338723B2Mar 4, 2008
Aluminum nitride substrate and production method
NGK INSULATORS LTD3 citations63
US12354900B2Jul 8, 2025
Ceramic material having high resistivity and high corrosion resistance, and wafer placement table
NGK INSULATORS LTD0 citations60
US8008602B2Aug 30, 2011
Electrostatic chuck heater
NGK INSULATORS LTD3 citations59
US12581904B2Mar 17, 2026
Cooling plate and member for semiconductor manufacturing apparatus
NGK INSULATORS LTD0 citations57
US7354652B2Apr 8, 2008
Corrosion-resistant member and producing method thereof
NGK INSULATORS LTD0 citations52
US7252872B2Aug 7, 2007
Joined structures of ceramics
NGK INSULATORS LTD1 citations52
US11398401B2Jul 26, 2022
Wafer mounting table and method of manufacturing the same
NGK INSULATORS LTD0 citations51
US7261780B2Aug 28, 2007
Ceramic susceptor and a method of cleaning the same
NGK INSULATORS LTD1 citations50
US7633738B2Dec 15, 2009
Electrostatic chuck and manufacturing method thereof
NGK INSULATORS LTD0 citations42
US7446993B2Nov 4, 2008
Alumina sintered body
NGK INSULATORS LTD0 citations42
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
7 patentsUS6796799B1Sep 28, 2004
Behavior determining apparatus, care system, care residence and behavior information specifying apparatus and system
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD108 citations98
US5889459AMar 30, 1999
Metal oxide film resistor
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD103 citations96
US5961919AOct 5, 1999
Deodorizing and sterilizing device having catalyst deterioration sensing function
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD22 citations92
US5578248ANov 26, 1996
Composition for use in a transparent and electrically conductive film and a method for making the film
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD23 citations92
US5403616AApr 4, 1995
Method for forming patterned transparent conducting film
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD45 citations92
US5998011ADec 7, 1999
Composition for use in a transparent and electrically conductive film and a method for making the film
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD11 citations74
US6777024B2Aug 17, 2004
Method of manufacturing gas sensors
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD3 citations60