Inventor
DISTL JOSEF
DE2 patents
Patents
2 patentsUS6824277B2Nov 30, 2004
Optical beam guidance system and method for preventing contamination of optical components contained therein
ZEISS CARL SMT AG8 citations65
US7551375B2Jun 23, 2009
Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assembly
ZEISS CARL SMT AG0 citations49