Inventor
TOBANA TOSHIKATSU
JP8 patents
Patents
8 patentsUS11251048B2Feb 15, 2022
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations71
US10069443B2Sep 4, 2018
Dechuck control method and plasma processing apparatus
TOKYO ELECTRON LTD4 citations68
US11081351B2Aug 3, 2021
Method of processing substrate, device manufacturing method, and plasma processing apparatus
TOKYO ELECTRON LTD0 citations61
US11062882B2Jul 13, 2021
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations59
US11594398B2Feb 28, 2023
Apparatus and method for plasma processing
TOKYO ELECTRON LTD0 citations50
US11569094B2Jan 31, 2023
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations45
US10867778B2Dec 15, 2020
Cleaning method and processing apparatus
TOKYO ELECTRON LTD0 citations39
US9911621B2Mar 6, 2018
Method for processing target object
TOKYO ELECTRON LTD0 citations37