Inventor

OKADA SOICHIRO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “OKADA SOICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents

US11205571B2Dec 21, 2021

Mask forming method

TOKYO ELECTRON LTD0 citations59

US12197129B2Jan 14, 2025

Substrate treatment method and substrate treatment system

TOKYO ELECTRON LTD0 citations50

US9748101B2Aug 29, 2017

Substrate treatment method, computer storage medium, and substrate treatment system

TOKYO ELECTRON LTD0 citations39

US9911621B2Mar 6, 2018

Method for processing target object

TOKYO ELECTRON LTD0 citations37

TOKYO ELECTON LTD

1 patent

US9165797B2Oct 20, 2015

Liquid processing apparatus, liquid processing method, and storage medium

TOKYO ELECTON LTD5 citations69