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Inventor
TENG CHIH S
US
2 patents
Patents
2 patents
US5605849A
Feb 25, 1997
Use of oblique implantation in forming base of bipolar transistor
NAT SEMICONDUCTOR CORP
20 citations
89
US5607873A
Mar 4, 1997
Method for forming contact openings in a multi-layer structure that reduces overetching of the top conductive structure
NAT SEMICONDUCTOR CORP
13 citations
66