Inventor
KWON DAEWON
US7 patents
⚠️ This page may combine multiple inventors who share the name “KWON DAEWON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VEECO INSTR INC
3 patentsUS9748113B2Aug 29, 2017
Method and apparatus for controlled dopant incorporation and activation in a chemical vapor deposition system
VEECO INSTR INC2 citations69
US9627239B2Apr 18, 2017
Wafer surface 3-D topography mapping based on in-situ tilt measurements in chemical vapor deposition systems
VEECO INSTR INC3 citations69
US9976909B2May 22, 2018
Control of stray radiation in a CVD chamber
VEECO INSTR INC0 citations45
RUDOLPH TECHNOLOGIES INC
2 patentsUS6519045B2Feb 11, 2003
Method and apparatus for measuring very thin dielectric film thickness and creating a stable measurement environment
RUDOLPH TECHNOLOGIES INC36 citations89
US6934031B2Aug 23, 2005
Methods and apparatus for determining optical constants of semiconductors and dielectrics with interband states
RUDOLPH TECHNOLOGIES INC4 citations59