Inventor

KLOESCH PETER

DE2 patents

⚠️ This page may combine multiple inventors who share the name “KLOESCH PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLOESCH PETER

1 patent

US8212992B2Jul 3, 2012

Device for damping vibrations in projection exposure apparatuses for semiconductor lithography

KLOESCH PETER2 citations50

SIGEL BENJAMIN

1 patent

US9030644B2May 12, 2015

Projection exposure apparatus for semiconductor lithography including an actuator system

SIGEL BENJAMIN1 citations39