Inventor

SOUMA YASUTAKA

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SOUMA YASUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7891365B2Feb 22, 2011

Nozzle cleaning apparatus, nozzle cleaning method, and a computer-readable storage medium storing nozzle cleaning program

TOKYO ELECTRON LTD8 citations80

US7050710B2May 23, 2006

Thermal treatment equipment and thermal treatment method

TOKYO ELECTRON LTD4 citations60

HIRAO TAKESHI

1 patent

US8562753B2Oct 22, 2013

Nozzle cleaning method and a computer-readable storage medium storing nozzle cleaning program

HIRAO TAKESHI0 citations42