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Inventor
OSUGA MAKOTO
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “OSUGA MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
1 patent
US4388140A
Jun 14, 1983
Apparatus for wet treatment of wafer materials
SHINETSU CHEMICAL CO
34 citations
88
SHINETSU HANDOTAI KK
1 patent
US6080641A
Jun 27, 2000
Method of manufacturing semiconductor wafer
SHINETSU HANDOTAI KK
6 citations
68