Inventor

CHANG CHIA-DER

TW37 patents

⚠️ This page may combine multiple inventors who share the name “CHANG CHIA-DER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHANG CHIA-DER

TAIWAN SEMICONDUCTOR MFG CO LTD

Gate feature in FinFET device

Semiconductor device with an interconnect structure and method for forming the same

Gate feature in finFET device

Mechanism for forming metal gate structure

Semiconductor device with an interconnect structure and method for forming the same

Ultra-thin fin structure and method of fabricating the same

Ultra-thin fin structure and method of fabricating the same

Method of fabricating a MOSFET with an undoped channel

Isolation structures for semiconductor devices

Mechanism for forming metal gate structure

Gate feature in FinFET device

Gate feature in FinFET device

Non-planar field effect transistor having a semiconductor fin and method for manufacturing

Ultra-thin fin structure and method of fabricating the same

Semiconductor device with an interconnect structure and method for forming the same

Isolation structures for semiconductor devices

Isolation structures for semiconductor devices

Method for forming a source/drain of a semiconductor device having an insulating stack in a recess structure

Source/drain structure for semiconductor device

Method of fabricating a semiconductor device having a T-shape in the metal gate line-end

Semiconductor device having a reversed T-shaped profile in the metal gate line-end

Mechanism for forming metal gate structure

Semiconductor device with an interconnect structure and method for forming the same

Method for manufacturing non-planar field effect transistor having a semiconductor fin

Method of fabricating a MOSFET with an undoped channel

Mechanism for forming metal gate structure

Semiconductor device structure and method for forming the same

Semiconductor device structure and method for forming the same

Metal gate structure and manufacturing method thereof

Hybrid FinFET structure

Semiconductor structure and manufacturing method thereof

Semiconductor device structure and method for forming the same

MIM capacitor and method of forming the same

TAIWAN SEMICONDUCTOR MFG

Method for forming an improved low power SRAM contact

Method for forming an improved low power SRAM contact

Planarization method for deep sub micron shallow trench isolation process

TAIWAN SEMICONDUCTOR MFG LTD

Efficient method for monitoring gate oxide damage related to plasma etch chamber processing history