Inventor
MONAHAN STEVEN E
US3 patents
Patents
3 patentsUS5299393AApr 5, 1994
Slurry containment device for polishing semiconductor wafers
IBM33 citations86
US4810322AMar 7, 1989
Anode plate for a parallel-plate reactive ion etching reactor
IBM17 citations68
US5279926AJan 18, 1994
Method and apparatus for removing vapor from a pressurized sprayed liquid in the manufacture of semiconductor integrated circuits
IBM7 citations66