Inventor

MEHLKOPP KLAUS

DE3 patents

⚠️ This page may combine multiple inventors who share the name “MEHLKOPP KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SEMICONDUCTOR MFG

1 patent

US6864988B2Mar 8, 2005

Optical system with isolated measuring structure

ZEISS CARL SEMICONDUCTOR MFG24 citations90

ZEISS STIFTUNG

1 patent

US6523443B1Feb 25, 2003

Process for manufacturing optical surfaces and shaping machine for carrying out this process

ZEISS STIFTUNG47 citations90

AMSL NETHERLANDS BV

1 patent

US6750949B2Jun 15, 2004

Lithographic apparatus and device manufacturing method

AMSL NETHERLANDS BV19 citations88