Inventor

OOKAWA YOSHIHITO

JP2 patents

Patents

2 patents

US6758941B1Jul 6, 2004

Plasma processing unit, window member for plasma processing unit and electrode plate for plasma processing unit

TOKYO ELECTRON LTD38 citations89

US6448094B2Sep 10, 2002

Method of detecting etching depth

TOKYO ELECTRON LTD15 citations81