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Inventor
DESEPTE ANDY W
US
2 patents
⚠️ This page may combine multiple inventors who share the name “DESEPTE ANDY W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
1 patent
US7732728B2
Jun 8, 2010
Apparatuses for adjusting electrode gap in capacitively-coupled RF plasma reactor
LAM RES CORP
52 citations
96
DHINDSA RAJINDER
1 patent
US8080760B2
Dec 20, 2011
Apparatuses for adjusting electrode gap in capacitively-coupled RF plasma reactor
DHINDSA RAJINDER
30 citations
91