Inventor

EKKO HIROSHI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “EKKO HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

2 patents

US10131992B2Nov 20, 2018

Substrate processing apparatus, method of controlling substrate processing apparatus, method of maintaining substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC2 citations68

US9690879B2Jun 27, 2017

Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipe

HITACHI INT ELECTRIC INC0 citations36

KOKUSAI ELECTRIC CORP

1 patent

US12538730B2Jan 27, 2026

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations41

NOGAMI SHIGEKI

1 patent

US8806370B2Aug 12, 2014

Substrate processing apparatus

NOGAMI SHIGEKI1 citations31